JPH0286138U - - Google Patents

Info

Publication number
JPH0286138U
JPH0286138U JP16587888U JP16587888U JPH0286138U JP H0286138 U JPH0286138 U JP H0286138U JP 16587888 U JP16587888 U JP 16587888U JP 16587888 U JP16587888 U JP 16587888U JP H0286138 U JPH0286138 U JP H0286138U
Authority
JP
Japan
Prior art keywords
support rod
wafer
receivers
longitudinal direction
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16587888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16587888U priority Critical patent/JPH0286138U/ja
Publication of JPH0286138U publication Critical patent/JPH0286138U/ja
Pending legal-status Critical Current

Links

JP16587888U 1988-12-22 1988-12-22 Pending JPH0286138U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16587888U JPH0286138U (en]) 1988-12-22 1988-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16587888U JPH0286138U (en]) 1988-12-22 1988-12-22

Publications (1)

Publication Number Publication Date
JPH0286138U true JPH0286138U (en]) 1990-07-09

Family

ID=31452762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16587888U Pending JPH0286138U (en]) 1988-12-22 1988-12-22

Country Status (1)

Country Link
JP (1) JPH0286138U (en])

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